Advanced Wet Processing System for Plating, Etching, Stripping & Cleaning

Modular Wet-Bench

The modular wet bench is a compact and flexible wet processing system for the treatment of wafers and panels in plating, etching, stripping and cleaning applications. The system is based on a single process module with two tanks arranged in series and a side-mounted control cabinet. A touch display in the process module as well as a movable central touch monitor provide quick access to status information and process recipes.

After manual loading, a fully automated, integrated robotic arm handles the transport of the carriers from front to rear between the two process tanks as well as the agitation within the tanks. The clear and functional design allows easy access for maintenance and service.

The base unit, consisting of a control cabinet and one process module can be flexibly and indefinitely expanded with additional process modules.

Features

  • Single module with two process tanks arranged in series

  • Integrated fully automated robotic arm
  • Automatic agitation
  • Touch display and touch monitor for global and local control
  • Compact and space-saving design
  • Easy maintenance
  • Flexibly expandable through modular design
  • Suitable for plating, etching, stripping, development, and cleaning processes
  • Global user and recipe management
  • Wide range of supported communication protocols and integration standards such as OPC UA, SECS/GEM, SMEMA, etc.

Technical Base Specifications

  • Machine manufacturing in PP or stainless steel

  • Dimensions (L × W × H): approx. 1850 × 1500 × 2420 mm

  • Total weight: approx. 750 kg

  • Power supply: 1 × 400 V, 3-phase, 50 Hz
  • Compressed air (CDA): 6.5 bar, 80 l/min
  • Nitrogen: 4 bar, max. 1 l/min
  • DI water: 5–6 bar, 1000 l/h, >14 MΩ·cm
  • Cleanroom recommendation: ISO 7 (Class 10,000) or higher
  • Wide selection of tank materials: quartz glass, stainless steel, PVA, PP, etc., with various coatings like PVA
Modular Wet-Bench with 2 process modules